Profil
Nom:
Name:
MARTINET Christine
Equipe(s):
Team(s):
- Spectroscopies optiques des matériaux verres, amorphes et à nanoparticules
- Support à la recherche
Position:
Ingénieur
Plateforme:
Plateform:
- ILMTECH - Caractérisation
Bureau(x):
Office(s):
- LIPPMANN / 2ème / 12-042
Mel:
Mail:
christine.martinet@univ-lyon1.fr
Tél(s):
Phone(s):
- 0472448334
Oxidation of crystalline Si in an O2 plasma: Growth kinetics and oxide characterization
Journal of Applied Physics, vol. 81, p6996-7005
(1997)
Low-temperature oxidation of Si in a microwave electron cyclotron resonance excited O2 plasma
Applied Physics Letters, vol. 67, p3500-3502
(1995)
Infrared evidence for inhomogeneity in SiO2 films grown by plasma assisted oxidation of Si
Applied Physics Letters, vol. 67, p2696-2698
(1995)
Analysis of the vibrational mode spectra of amorphous SiO2 films
Journal of Applied Physics, vol. 77, p4343-4348
(1995)
Comparison of Dry Development Techniques using O 2 and SO 2 /O 2 Low-Pressure Plasmas
Japanese Journal of Applied Physics, vol. 33, p991
(1994)